Rapid Prototyping of Micromechanical Devices Using a Q-Switched Nd:YAG Laser with Optional Frequency Doubling

نویسندگان

  • S. Dauer
  • S. Büttgenbach
  • A. Ehlert
چکیده

A laser technology for fabricating microelectromechanical components has been developed. Using a Q-switched Nd:YAG laser with optional frequency doubling, bulk silicon wafers, silicon membranes, and thin-films deposited on different substrates are micromachined without using lithography-based technologies. Applications are for example rapid prototyping or small lot production of micromechanical devices.

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تاریخ انتشار 1998